技术参数

大范围高精度扫描探针显微镜 安捷伦5500LS

Specifications
• Stage
- Standard vacuum chuck size: 150 mm
- Sample thickness: up to 35 mm
- Examination area: 150 mm x 150 mm
- Fully motorized, controlled optics
- Optical resolution: 2 μm

Compatibility
• Compatible with Agilent 5 series family
of products and all AC modes
• Compatible with multi-purpose scanners
• Compatible with CSAFM, STM,
and EFM/MFM
• Compatible with imaging in air and
fluids, including but not limited to life sciences,
electrochemistry, and corrosion applications
• Compatible with temperature control
(-30oC to 250oC)

S c a n n e rs
• Large Scanner
- Scanning range: 100 μm x 100 μm
- Z range: 7 μm
- Vertical noise: 0.5Å RMS
• Small Scanner
- Scanning range: 10 μm x 10 μm
- Z range: 2 μm
- Vertical noise: <0.1Å RMS